Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150563 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Sergei Sokolov, Sergey Tarabrin, Su-Ting CHENG, Armand Eugene Albert Koolen, Markus Franciscus Antonius Eurlings | 2021-10-19 |
| 10884345 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Roy Werkman | 2021-01-05 |
| 10627729 | Calibration method for a lithographic apparatus | Emil Peter Schmitt-Weaver, Jens Stäcker, Roy Werkman | 2020-04-21 |
| 9217916 | Lithographic apparatus and device manufacturing method | Paul Christiaan Hinnen, Marcus Adrianus Van De Kerkhof, Reiner Maria Jungblut | 2015-12-22 |
| 8263296 | Lithographic apparatus and device manufacturing method | Paul Christiaan Hinnen, Marcus Adrianus Van De Kerkhof, Reiner Maria Jungblut | 2012-09-11 |
| 7826037 | Radiation beam pulse trimming | Huibert Visser, Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Cornelis Cornelia De Bruijn | 2010-11-02 |