Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189302 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2025-01-07 |
| 12032297 | Method for monitoring lithographic apparatus | Kaustuve Bhattacharyya, Martin Kers | 2024-07-09 |
| 11774862 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2023-10-03 |
| 11422476 | Methods and apparatus for monitoring a lithographic manufacturing process | Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals, Leon Martin Levasier | 2022-08-23 |
| 11347150 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2022-05-31 |
| 11249404 | System and method for measurement of alignment | Kaustuve Bhattacharyya, Rene Marinus Gerardus Johan Queens, Wolfgang Henke, Wim Tjibbo Tel, Theodorus Franciscus Adrianus Maria Linschoten | 2022-02-15 |
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2021-11-16 |
| 11022896 | Mark position determination method | Amir Bin Ismail, Kaustuve Bhattacharyya, Paul DERWIN | 2021-06-01 |
| 10990018 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Yichen Zhang, Petrus Gerardus Van Rhee +4 more | 2021-04-27 |
| 10884345 | Calibration method for a lithographic apparatus | Jens Stäcker, Koenraad Remi André Maria Schreel, Roy Werkman | 2021-01-05 |
| 10866527 | Methods and apparatus for monitoring a lithographic manufacturing process | Kaustuve Bhattacharyya, Wim Tjibbo Tel, Frank Staals, Leon Martin Levasier | 2020-12-15 |
| 10684557 | Method for adjusting actuation of a lithographic apparatus | Rene Marinus Gerardus Johan Queens | 2020-06-16 |
| 10627729 | Calibration method for a lithographic apparatus | Jens Stäcker, Koenraad Remi André Maria Schreel, Roy Werkman | 2020-04-21 |
| 10078273 | Lithographic apparatus with data processing apparatus | Wolfgang Henke, Christopher PRENTICE, Frank Staals, Wim Tjibbo Tel | 2018-09-18 |
| 9971251 | Lithography system and a machine learning controller for such a lithography system | Wolfgang Henke, Thomas Leo Maria Hoogenboom, Pavel Izikson, Paul Frank Luehrmann, Daan Maurits Slotboom +2 more | 2018-05-15 |
| 9715181 | Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Paul Frank Luehrmann, Wolfgang Henke, Marc Jurian Kea | 2017-07-25 |
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Paul Frank Luehrmann, Eduardus Johannes Gerardus Boon, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme, Wolfgang Henke +2 more | 2016-11-29 |
| 7952685 | Illuminator for a lithographic apparatus and method | Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Bernd Geh | 2011-05-31 |