Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662666 | Sub-field control of a lithographic process and associated apparatus | Rowin MEIJERINK, Putra SAPUTRA, Pieter Gerardus Jacobus SMORENBERG, Theo Wilhelmus Maria THIJSSEN, Khalid ELBATTAY +3 more | 2023-05-30 |
| 11022896 | Mark position determination method | Emil Peter Schmitt-Weaver, Amir Bin Ismail, Kaustuve Bhattacharyya | 2021-06-01 |