Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078935 | Device manufacturing methods | Rizvi Rahman, Cédric Désiré Grouwstra | 2024-09-03 |
| 12045555 | Method to label substrates based on process parameters | Vahid BASTANI, Alexander Ypma, Dag Sonntag, Everhardus Cornelis Mos, Chenxi Lin | 2024-07-23 |
| 11803127 | Method for determining root cause affecting yield in a semiconductor manufacturing process | Chenxi Lin, Cyrus E. Tabery, Simon Philip Spencer Hastings, Boris Menchtchikov, Yi Zou +5 more | 2023-10-31 |
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-10-10 |
| 11774862 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2023-10-03 |
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-02-28 |
| 11493851 | Lithographic method and lithographic apparatus | Xing Lan Liu, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2022-11-08 |
| 11442366 | Device manufacturing methods | Rizvi Rahman, Cédric Désiré Grouwstra | 2022-09-13 |
| 11392044 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan +3 more | 2022-07-19 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |
| 11300886 | Method of adapting feed-forward parameters | Hadi YAGUBIZADE, Ahmet Koray Erdamar | 2022-04-12 |
| 11181829 | Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process | Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin | 2021-11-23 |
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2021-11-16 |
| 11156923 | Lithographic method and lithographic apparatus | Xing Lan Liu, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2021-10-26 |
| 11099485 | Maintaining a set of process fingerprints | Alexander Ypma, Vahid BASTANI, Dag Sonntag, Jelle Nije, Georgios TSIROGIANNIS +1 more | 2021-08-24 |
| 11086229 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2021-08-10 |
| 11036148 | Patterning device cooling system and method of thermally conditioning a patterning device | Güneş Nakibo{hacek over (g)}lu, Frank Johannes Jacobus Van Boxtel, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren | 2021-06-15 |
| 11036146 | Method and apparatus to reduce effects of nonlinear behavior | Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Ten Berge, Peter Hanzen Wardenier, Erik Weber Jensen | 2021-06-15 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more | 2021-06-08 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2021-03-30 |
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2020-12-29 |
| 10642166 | Patterning device cooling apparatus | Güneş Nakibo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Geoffrey Alan Schultz, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2020-05-05 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan +3 more | 2020-03-03 |
| 10545410 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Masashi Ishibashi, Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Xing Lan Liu, Reiner Maria Jungblut +2 more | 2020-01-28 |