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Device manufacturing methods |
Rizvi Rahman, Hakki Ergün Cekli |
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Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2023-10-10 |
| 11592753 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2023-02-28 |
| 11525786 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more |
2022-12-13 |
| 11520238 |
Optimizing an apparatus for multi-stage processing of product units |
Jelle Nije, Alexander Ypma, Dimitra GKOROU, Georgios TSIROGIANNIS, Robert Jan Van Wijk +3 more |
2022-12-06 |
| 11448973 |
Computational metrology based correction and control |
Manouk RIJPSTRA, Cornelis Johannes Henricus LAMBREGTS, Wim Tjibbo Tel, Sarathi ROY, Chi-Fei NIEN +3 more |
2022-09-20 |
| 11442366 |
Device manufacturing methods |
Rizvi Rahman, Hakki Ergün Cekli |
2022-09-13 |
| 11327407 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more |
2022-05-10 |
| 11150562 |
Optimizing an apparatus for multi-stage processing of product units |
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2021-10-19 |
| 10955353 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
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2021-03-23 |
| 10877381 |
Methods of determining corrections for a patterning process |
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2020-12-29 |
| 10649341 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2020-05-12 |
| 10509326 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2019-12-17 |
| 10241055 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more |
2019-03-26 |
| 9964865 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus |
Nicolaas Rudolf Kemper, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Hua Li, Marinus Jochemsen |
2018-05-08 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-07-11 |
| 9465302 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2016-10-11 |
| 9329491 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus |
Nicolaas Rudolf Kemper, Norbertus Josephus Martinus Van Den Nieuwelaar, Dirk De Vries, Hua Li, Marinus Jochemsen |
2016-05-03 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2015-05-19 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-01-27 |
| 8760662 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more |
2014-06-24 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-28 |
| 8553230 |
Method and apparatus for angular-resolved spectroscopic lithography characterization |
Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more |
2013-10-08 |
| 8435593 |
Method of inspecting a substrate and method of preparing a substrate for lithography |
Rik Teodoor Vangheluwe, Youri Johannes Laurentius Maria Van Dommelen, Johannes Anna Quaedackers, Thijs Egidius Johannes Knaapen, Ralf Martinus Marinus Daverveld +1 more |
2013-05-07 |
| 8330936 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Youri Johannes Laurentius Maria Van Dommelen, Richard Moerman |
2012-12-11 |