Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466976 | Method and system for measuring a height map of a surface of an object, and computer program therefor | — | 2022-10-11 |
| 11378893 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2022-07-05 |
| 10838310 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2020-11-17 |
| 10794688 | Optical interference measuring device | Ken Motohashi, Adriaan Tiemen ZUIDERWEG | 2020-10-06 |
| 10636157 | Method and system for calculating a height map of a surface of an object from an image stack in scanning optical 2.5D profiling of the surface by an optical system | — | 2020-04-28 |
| 10563974 | Method for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift | Adriaan Tiemen ZUIDERWEG | 2020-02-18 |
| 10302415 | Method for calculating a height map of a body of transparent material having an inclined or curved surface | — | 2019-05-28 |
| 10254663 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more | 2019-04-09 |
| 10024648 | Interference measuring device and method of measurement using the same device | Tatsuya Nagahama, Ken Motohashi, Han Haitjema | 2018-07-17 |
| 9881400 | Method for measuring a high accuracy height map of a test surface | Adriaan Tiemen ZUIDERWEG, Harm Visscher | 2018-01-30 |
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Christine Corinne Mattheus | 2016-09-06 |
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2016-02-23 |
| 9188880 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2015-11-17 |
| 9103651 | Method and apparatus for determining a property of a surface | Han Haitjema | 2015-08-11 |
| 8982328 | Method and apparatus for overlay measurement | Henricus Johannes Lambertus Megens, Christian Marinus Leewis, Peter Clement Paul Vanoppen | 2015-03-17 |
| 8891061 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Christine Corinne Mattheus | 2014-11-18 |
| 8685626 | Method of measuring a characteristic | Paul Christiaan Hinnen, Antoine Gaston Marie Kiers, Christian Marinus Leewis | 2014-04-01 |
| 8502955 | Method of determining a characteristic | Henricus Johannes Lambertus Megens, Christian Marinus Leewis, Peter Clement Paul Vanoppen | 2013-08-06 |
| 8435593 | Method of inspecting a substrate and method of preparing a substrate for lithography | Rik Teodoor Vangheluwe, Youri Johannes Laurentius Maria Van Dommelen, Cédric Désiré Grouwstra, Thijs Egidius Johannes Knaapen, Ralf Martinus Marinus Daverveld +1 more | 2013-05-07 |
| 8119333 | Lithographic method | Eddy Cornelis Antonius Van Der Heijden, Dorothea Maria Christina Oorschot, Hieronymus Johannus Christiaan Meessen, Yin Fong Choi | 2012-02-21 |
| 7992115 | Overlay measurement on double patterning substrate | Eddy Cornelis Antonius Van Der Heijden, Dorothea Maria Christina Oorschot, Hieronymus Johannus Christiaan Meessen, Yin Fong Choi | 2011-08-02 |
| 7804575 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more | 2010-09-28 |
| 7670731 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Judocus Marie Dominicus Stoeldraijer, Johannes Wilhelmus De Klerk, Alexander Serebryakov | 2010-03-02 |
| 7596420 | Device manufacturing method and computer program product | Antoine Gaston Marie Kiers | 2009-09-29 |
| 7382438 | Lithographic apparatus and device manufacturing method | Hans Van Der Laan | 2008-06-03 |