Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8896809 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Jan Bernard Plechelmus Van Schoot, Diederik Jan Maas | 2014-11-25 |
| 7903234 | Lithographic apparatus, device manufacturing method and computer program product | Erik Roelof Loopstra, Heine Melle Mulder, Timotheus Franciscus Sengers, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma +1 more | 2011-03-08 |
| 7804582 | Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens, Antonius Johannes De Kort, Franciscus Van De Mast, Marteijn De Jong | 2010-09-28 |
| 7732110 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Johannes Wilhelmus De Klerk | 2010-06-08 |
| 7670731 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Johannes Anna Quaedackers, Johannes Wilhelmus De Klerk, Alexander Serebryakov | 2010-03-02 |
| 7655368 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Johannes Wilhelmus De Klerk | 2010-02-02 |
| 7148952 | Lithographic apparatus and device manufacturing method | Markus Franciscus Antonius Eurlings, Johannes Jacobus Matheus Baselmans, Hako Botma, Jan Bruining, Marcel Mathijs Theodore Marie Dierichs +1 more | 2006-12-12 |
| 6406834 | Lithographic projection method | Jan Jaap Kuit, Jan A. M. Smits | 2002-06-18 |
| 6404499 | Lithography apparatus with filters for optimizing uniformity of an image | Jan Wietse Ricolt Ten Cate, Franciscus Henricus Alphonsus Gerardus Fey, Joost Sytsma | 2002-06-11 |