Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8675176 | Parameter control in a lithographic apparatus using polarization | Marinus Johanes Maria Van Dam, Wilhelmus Petrus De Boeij | 2014-03-18 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more | 2013-08-20 |
| 8068210 | Lithographic apparatus, device manufacturing method and computer program product | — | 2011-11-29 |
| 7889316 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Wilhelmus Petrus De Boeij, Simon De Groot, Ewoud Vreugdenhil | 2011-02-15 |
| 7732110 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Judocus Marie Dominicus Stoeldraijer | 2010-06-08 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |
| 7670731 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Johannes Anna Quaedackers, Judocus Marie Dominicus Stoeldraijer, Alexander Serebryakov | 2010-03-02 |
| 7655368 | Method for exposing a substrate and lithographic projection apparatus | Jozef Maria Finders, Judocus Marie Dominicus Stoeldraijer | 2010-02-02 |
| 7595863 | Lithographic apparatus, excimer laser and device manufacturing method | Robertus Cornelis Martinus Kruif, Richard Joseph Bruls, Thomas Josephus Maria Castenmiller, Erik Petrus Buurman | 2009-09-29 |
| 7580113 | Method of reducing a wave front aberration, and computer program product | Wim Tjibbo Tel, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma, Tammo Uitterdijk | 2009-08-25 |
| 7511799 | Lithographic projection apparatus and a device manufacturing method | Wim Tjibbo Tel, Peter Hanzen Wardenier | 2009-03-31 |
| 7355674 | Lithographic apparatus, device manufacturing method and computer program product | — | 2008-04-08 |