Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8174680 | Substrate handler, lithographic apparatus and device manufacturing method | Harmen Klaas Van Der Schoot, Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters, Aart Adrianus Van Beuzekom | 2012-05-08 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Laurentius Catrinus Jorritsma +7 more | 2010-05-25 |
| 7576835 | Substrate handler, lithographic apparatus and device manufacturing method | Harmen Klaas Van Der Schoot, Hernes Jacobs, Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters, Aart Adrianus Van Beuzekom | 2009-08-18 |
| 7307695 | Method and device for alignment of a substrate | Patricius Aloysius Jacobus Tinnemans, Raimond Visser | 2007-12-11 |