Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393126 | Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer | — | 2025-08-19 |
| 12235592 | Object holder, electrostatic sheet and method for making an electrostatic sheet | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koos Van Berkel, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin +7 more | 2025-02-25 |
| 12111581 | Method to manufacture nano ridges in hard ceramic coatings | Mehmet Ali AKBAS, Christopher Mason, Matthew Lipson, David Hart PETERSON, Michael Perry +3 more | 2024-10-08 |
| 11988971 | Lithographic apparatus, substrate table, and method | Matthew Lipson, Satish Achanta, Benjamin David DAWSON, Matthew Anthony Sorna, Iliya Sigal | 2024-05-21 |
| RE49066 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelis Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2022-05-10 |
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, David Hart PETERSON, Michael Perry, Richard B. Lewis, Iliya Sigal | 2022-03-08 |
| 10908518 | Lithographic apparatus and method | Santiago E. DELPUERTO, Antonius Franciscus Johannes De Groot, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Matthew Lipson +3 more | 2021-02-02 |
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Jacobus Cornelius Gerardus Van Der Sanden, Geoffrey O'Connor +1 more | 2019-06-18 |
| 10310391 | Electrostatic clamp and a method for manufacturing the same | Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Steven M. Zimmerman | 2019-06-04 |
| 10146142 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2018-12-04 |
| 10001713 | Lithographic apparatus and method | Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Louis John Markoya +3 more | 2018-06-19 |
| 9606448 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2017-03-28 |
| 9482967 | Lithographic apparatus, control system and device manufacturing method | Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Nicolas Lallemant | 2016-11-01 |
| 9442388 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2016-09-13 |
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens +2 more | 2015-10-27 |
| 8913225 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Laurens Anthony Sanderse | 2014-12-16 |
| 8675173 | Lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Johannes Henricus Wilhelmus Jacobs | 2014-03-18 |
| 8542342 | Method of manufacturing a miniaturized device | Markus Schwab, Aksel Goehnermeier, Toralf Gruner | 2013-09-24 |
| 8045134 | Lithographic apparatus, control system and device manufacturing method | Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Nicolas Lallemant | 2011-10-25 |
| 8013978 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Laurens Anthony Sanderse | 2011-09-06 |
| 7924403 | Lithographic apparatus and device and device manufacturing method | Paulus Martinus Maria Liebregts, Johannes Henricus Wilhelmus Jacobs | 2011-04-12 |
| 7843552 | Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto | Richard Joseph Bruls, Orlando Serapio Cicilia, Herman Boom | 2010-11-30 |
| 7580113 | Method of reducing a wave front aberration, and computer program product | Wim Tjibbo Tel, Freerk Adriaan Stoffels, Laurentius Catrinus Jorritsma, Johannes Wilhelmus De Klerk | 2009-08-25 |
| 7538875 | Lithographic apparatus and methods for use thereof | Remco Marcel Van Dijk, Donis Flagello, Michel Fransois Hubert Klaassen | 2009-05-26 |
| 7538952 | Lithographic apparatus, aberration correction device and device manufacturing method | Laurentius Catrinus Jorritsma | 2009-05-26 |