| 11366399 |
Laser beam monitoring system |
— |
2022-06-21 |
| 10222703 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Paul Van Der Veen +2 more |
2019-03-05 |
| 9778575 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Paul Van Der Veen +2 more |
2017-10-03 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Andrei Mikhailovich Yakunin +1 more |
2016-09-13 |
| 9188881 |
Lithographic apparatus and method for reducing stray radiation |
Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings, Antonie Hendrik Verweij |
2015-11-17 |
| 9170498 |
Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor |
Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens, Haico Victor Kok +2 more |
2015-10-27 |
| 8937706 |
Lithographic apparatus and method |
Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Paul Van Der Veen |
2015-01-20 |
| 8629973 |
Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation |
Richard Carl Zimmerman, Peter Kochersperger, Todd R. Downey, Elizabeth Stone, Szilard Istvan Csiszar +2 more |
2014-01-14 |
| 8441611 |
Lithographic apparatus and method |
— |
2013-05-14 |
| 8279405 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Hans Van Der Laan |
2012-10-02 |
| 7952685 |
Illuminator for a lithographic apparatus and method |
Michel Fransois Hubert Klaassen, Bernd Geh, Emil Peter Schmitt-Weaver |
2011-05-31 |
| 7872731 |
Lithographic apparatus and device manufacturing method |
Michel Fransois Hubert Klaassen, Heine Melle Mulder, Erik Martijn Greijdanus |
2011-01-18 |
| 7697116 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Hans Van Der Laan |
2010-04-13 |
| 7525641 |
System and method for uniformity correction |
Richard Carl Zimmerman, Eric Brian Catey, David A. Hult, Alexander Kremer, Heine Melle Mulder +1 more |
2009-04-28 |
| 7375799 |
Lithographic apparatus |
Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Michel Fransois Hubert Klaassen, Martijn Gerard Dominique Wehrens, Tammo Uitterdijk |
2008-05-20 |
| 7170587 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Hans Van Der Laan |
2007-01-30 |
| 7038763 |
Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method |
Heine Melle Mulder |
2006-05-02 |
| 6710856 |
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
Hans Van Der Laan, Marcel Mathijs Theodore Marie Dierichs, Markus Franciscus Antonius Eurlings |
2004-03-23 |