Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8663881 | Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device | Erik Petrus Buurman | 2014-03-04 |
| 8629973 | Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation | Richard Carl Zimmerman, Hendrikus Robertus Marie Van Greevenbroek, Peter Kochersperger, Todd R. Downey, Elizabeth Stone +2 more | 2014-01-14 |