Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Marcus Adrianus Van De Kerkhof, Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Martijn Gerard Dominique Wehrens, Haico Victor Kok +2 more | 2015-10-27 |
| 8958053 | Lithographic apparatus and alignment method | Hermanus Johannes Maria Kreuwel | 2015-02-17 |
| 8730454 | EUV radiation source and method of generating EUV radiation | — | 2014-05-20 |