Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8085383 | System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module | — | 2011-12-27 |
| 8059266 | Radiometric Kirk test | Heine Melle Mulder, Minne Cuperus | 2011-11-15 |
| 7714984 | Residual pupil asymmetry compensator for a lithography scanner | — | 2010-05-11 |
| 7525641 | System and method for uniformity correction | Richard Carl Zimmerman, Eric Brian Catey, Alexander Kremer, Heine Melle Mulder, Hendrikus Robertus Marie Van Greevenbroek +1 more | 2009-04-28 |
| 7388647 | Method and system for real time uniformity feedback | — | 2008-06-17 |
| 6239863 | Removable cover for protecting a reticle, system including and method of using the same | Eric Brian Catey, Santiago del Puerto, Stephen Roux | 2001-05-29 |