| 12372888 |
Patterning device conditioning system and method |
Marcus Adrianus Van De Kerkhof, Ferdinandus Martinus Jozef Henricus Van De Wetering |
2025-07-29 |
| 10481510 |
Graphene spectral purity filter |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2019-11-19 |
| 10228615 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Arjen Boogaard, Florian Didier Albin Dhalluin +5 more |
2019-03-12 |
| 10031422 |
Lithographic apparatus |
Andrey Nikipelov, Vadim Yevgenyevich Banine |
2018-07-24 |
| 10001709 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels +2 more |
2018-06-19 |
| 9989844 |
Pellicle for reticle and multilayer mirror |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2018-06-05 |
| 9989863 |
Lithographic system |
Jan Bernard Plechelmus Van Schoot |
2018-06-05 |
| 9986628 |
Method and apparatus for generating radiation |
Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Andrey Nikipelov, Edgar Alberto Osorio Oliveros, Alexander Matthijs Struycken +2 more |
2018-05-29 |
| 9897930 |
Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element |
Leonid Aizikovitch Sjmaenok, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Denis Alexandrovich Glushkov |
2018-02-20 |
| 9860966 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Antonius Theodorus Wilhelmus Kempen, Hermanus Johannes Maria Kreuwel |
2018-01-02 |
| 9726989 |
Spectral purity filter |
Wouter Anthon Soer, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Martin Jacobus Johan Jak |
2017-08-08 |
| 9632419 |
Radiation source |
Jan Bernard Plechelmus Van Schoot, Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns, Hermanus Johannes Maria Kreuwel, Johannes Hubertus Josephina Moors +3 more |
2017-04-25 |
| 9606445 |
Lithographic apparatus and method of manufacturing a device |
Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more |
2017-03-28 |
| 9594306 |
Lithographic apparatus, spectral purity filter and device manufacturing method |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +2 more |
2017-03-14 |
| 9529283 |
Radiation source, lithographic apparatus, and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Leonid Aizikovitch Sjmaenok |
2016-12-27 |
| 9482960 |
Pellicle for reticle and multilayer mirror |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-11-01 |
| 9465306 |
Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device |
Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer |
2016-10-11 |
| 9448492 |
Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus |
Denis Alexandrovich Glushkov, Vladimir Nikolaevich Polkovnikov, Nikolay Nikolaevitch Salashchenko, Leonid Aizikovitch Sjmaenok |
2016-09-20 |
| 9442380 |
Method and apparatus for generating radiation |
Ramin Badie, Vadim Yevgenyevich Banine, Johan Frederik Dijksman, Antonius Theodorus Wilhelmus Kempen, Hendrikus Robertus Marie Van Greevenbroek +1 more |
2016-09-13 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns +5 more |
2016-08-09 |
| 9395630 |
Lithographic apparatus and method |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen |
2016-07-19 |
| 9377695 |
Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
Vadim Yevgenyevich Banine, Olav Waldemar Vladimir Frijns |
2016-06-28 |
| 9366967 |
Radiation source |
Vladimir Vitalevich Ivanov, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot |
2016-06-14 |
| 9329503 |
Multilayer mirror |
Vadim Iourievich Timoshkov, Jan Bernard Plechelmus Van Schoot, Antonius Theodorus Wilhelmus Kempen, Edgar Alberto Osorio Oliveros |
2016-05-03 |
| 9298110 |
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device |
Jens Arno Steinhoff, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Erik Roelof Loopstra, Hendrik Antony Johannes Neerhof +2 more |
2016-03-29 |