| 9411250 |
Radiation system and lithographic apparatus |
Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun |
2016-08-09 |
| 9366967 |
Radiation source |
Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Gerardus Hubertus Petrus Maria Swinkels, Jan Bernard Plechelmus Van Schoot |
2016-06-14 |
| 9363879 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2016-06-07 |
| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili, Vladimir Mihailovitch Krivtsun +3 more |
2016-04-05 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot +4 more |
2014-12-02 |
| 8755032 |
Radiation source and lithographic apparatus |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Vladimir Mihailovitch Krivtsun, Gerardus Hubertus Petrus Maria Swinkels +1 more |
2014-06-17 |
| 8685632 |
Radiation source, lithographic apparatus and device manufacturing method |
Antonius Theodorus Wilhelmus Kempen, Vadim Yevgenyevich Banine, Erik Roelof Loopstra |
2014-04-01 |
| 8493548 |
Lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Vladimir Mihailovitch Krivtsun |
2013-07-23 |
| 8368040 |
Radiation system and lithographic apparatus |
Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin, Dennis De Graaf +1 more |
2013-02-05 |
| 8317929 |
Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus |
Tatyana Victorovna Rakhimova, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Johannes Hubertus Josephina Moors, Aleksander Sergeevich Kovalev +1 more |
2012-11-27 |
| 8294128 |
Apparatus with plasma radiation source and method of forming a beam of radiation |
Vladimir Mihailovitch Krivtsun, Vadim Yevgenyevich Banine, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev, Yurii Victorovitch Sidelnikov +1 more |
2012-10-23 |
| 8242473 |
Radiation source |
Vadim Yevgenyevich Banine |
2012-08-14 |
| 7872244 |
Lithographic apparatus and device manufacturing method |
Vadim Yevgenyevich Banine, Arno Jan Bleeker, Konstantin Nikolaevich Koshelev, Pavel Stanislavovich Antsiferov, Vladimir Mihailovitch Krivtsun +1 more |
2011-01-18 |
| 7825390 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
Vladimir Mihallovitch Krivtsun, Vadim Yevgenyevich Banine, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev, Yurii Victorovitch Sidelnikov +1 more |
2010-11-02 |
| 7772570 |
Assembly for blocking a beam of radiation and method of blocking a beam of radiation |
Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev, Vladimir Mihailovitch Krivtsun |
2010-08-10 |
| 7763871 |
Radiation source |
Vadim Yevgenyevich Banine |
2010-07-27 |