| 9307624 |
Lithographic apparatus |
Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevich Koshelev, Givi Georgievich Zukakishvili +3 more |
2016-04-05 |
| 8294128 |
Apparatus with plasma radiation source and method of forming a beam of radiation |
Vladimir Mihailovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev +1 more |
2012-10-23 |
| 8018574 |
Lithographic apparatus, radiation system and device manufacturing method |
Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev +1 more |
2011-09-13 |
| 7928412 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more |
2011-04-19 |
| 7825390 |
Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus |
Vladimir Mihallovitch Krivtsun, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Evgeny Dmitrievich Korop, Konstantin Nikolaevich Koshelev +1 more |
2010-11-02 |
| 7629594 |
Lithographic apparatus, and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more |
2009-12-08 |
| 7034308 |
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Ralph Kurt, Frank Jeroen Pieter Schuurmans |
2006-04-25 |