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Lithographic apparatus, radiation system and device manufacturing method |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more |
2011-09-13 |
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Radiation source, lithographic apparatus and device manufacturing method |
Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Vladimir Vital'evitch Ivanov, Erik René Kieft, Erik Roelof Loopstra +5 more |
2009-05-05 |
| 7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun |
2008-12-09 |
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Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Vladimir Mihailovitch Krivtsun |
2008-02-26 |
| 7208746 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Vladimir Mihailovitch Krivtsum |
2007-04-24 |