| 8018574 |
Lithographic apparatus, radiation system and device manufacturing method |
Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev +1 more |
2011-09-13 |
| RE41362 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2010-06-01 |
| 7335900 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-02-26 |
| 7279690 |
Lithographic apparatus and device manufacturing method |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens +4 more |
2007-10-09 |
| 7251012 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Abraham Veefkind |
2007-07-31 |
| 7208746 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsum |
2007-04-24 |
| 6933510 |
Radiation source, lithographic apparatus, and device manufacturing method |
Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Evgenil Korob, Vadim Yevgenyevich Banine, Pavel Stanislavovich Antsiferov |
2005-08-23 |
| 6818912 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2004-11-16 |
| 6667484 |
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov |
2003-12-23 |