Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE41362 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop | 2010-06-01 |
| 7528395 | Radiation source, lithographic apparatus and device manufacturing method | Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Erik René Kieft, Erik Roelof Loopstra, Lucas Henricus Johannes Stevens +5 more | 2009-05-05 |
| 6933510 | Radiation source, lithographic apparatus, and device manufacturing method | Givi Georgievitch Zukavishvili, Konstantin Nikolaevitch Koshelev, Evgenil Korob, Vadim Yevgenyevich Banine, Pavel Stanislavovich Antsiferov | 2005-08-23 |
| 6818912 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop | 2004-11-16 |
| 6667484 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Frederik Bijkerk, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop | 2003-12-23 |
| 6614505 | Lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2003-09-02 |
| 4294433 | Pyrometallurgical method and furnace for processing heavy nonferrous metal raw materials | Andrei V. Vanjukov, Valery V. Mechev, Valentin P. Bystrov, Evgeny I. Ezhov, Mikhail G. Vasiliev +17 more | 1981-10-13 |
| 4252560 | Pyrometallurgical method for processing heavy nonferrous metal raw materials | Andrei V. Vanjukov, Valery V. Mechev, Valentin P. Bystrov, Evgeny I. Ezhov, Mikhail G. Vasiliev +17 more | 1981-02-24 |