Showing 1–12 of 12 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Vladimir Vital'evitch Ivanov | Asml Netherlands B.V. | 8 |
| 2 | Sergei Y. Golik | — | 2 |
| 2 | Dmitry Baklanov | Oak Novations | 2 |
| 2 | Dzhonson T. Khagazheev | — | 2 |
| 2 | Boris I. Kolesnikov | — | 2 |
| 2 | Mikhail G. Vasiliev | — | 2 |
| 2 | Valery V. Mechev | — | 2 |
| #8 | Aleksandr Borisovich Bobrikov | — | 1 |
| #8 | Vladimir Borisovich Fomichev | — | 1 |
| #8 | Sergei Yurevich Eroshevich | — | 1 |
| #8 | Viktor Mihailovich Tozik | — | 1 |
| #8 | Vladimir Ilich Lazarev | — | 1 |