Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360393 | Mirror, in particular for a microlithographic projection exposure system | Ben Wylie-Van Eerd, Kerstin Hild, Toralf Gruner, Stefan Schulte, Simone Weyler | 2022-06-14 |
| 10916356 | Reflective optical element | Dmitry Kuznetsov, Andrey E. Yakshin, Hartmut Enkisch, Viacheslav Medvedev | 2021-02-09 |
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Muharrem Bayraktar, Oliver Dier | 2018-06-12 |
| 9733580 | Method for producing a reflective optical element for EUV-lithography | Alexey Kuznetzov, Michael Gleeson, Robbert W. E. Van De Kruijs | 2017-08-15 |
| 9442383 | EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method | Udo Dinger, Muharrem Bayraktar, Oliver Dier | 2016-09-13 |
| 8638494 | Reflective optical element and method of manufacturing the same | Tim Tsarfati, Erwin Zoethout, Eric Louis | 2014-01-28 |
| 8411355 | Reflective optical element and method of manufacturing the same | Tim Tsarfati, Erwin Zoethout, Eric Louis | 2013-04-02 |
| RE41362 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov | 2010-06-01 |
| 7261957 | Multilayer system with protecting layer system and production method | Eric Louis, Andrey E. Yakshin, Peter Gorts, Sebastian Oestreich, Lambertus Gerhardus Albertus Michael Alink +2 more | 2007-08-28 |
| 7172788 | Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device | Andrey E. Yakshin, Eric Louis, Marco Wedowski, Roman Klein, Frank Stietz | 2007-02-06 |
| 6818912 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov | 2004-11-16 |
| 6667484 | Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby | Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili, Evgenii Dmitreevitch Korop, Vladimir Vital'evitch Ivanov | 2003-12-23 |
| 6656575 | Multilayer system with protecting layer system and production method | Eric Louis, Andrey E. Yakshin, Peter Gorts, Sebastian Oestreich | 2003-12-02 |
| 6483597 | Method for the production of multi-layer systems | Andrey E. Yakshin, Eric Louis | 2002-11-19 |
| 6469310 | Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus | Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik | 2002-10-22 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2002-09-17 |