Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Frederik Bijkerk, Oliver Dier | 2018-06-12 |
| 9442383 | EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method | Udo Dinger, Frederik Bijkerk, Oliver Dier | 2016-09-13 |