Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Ralf Winter +3 more | 2022-05-10 |
| 10520827 | Optical system, in particular for a microlithographic projection exposure apparatus | Hartmut Enkisch, Thomas Schicketanz, Matus Kalisky | 2019-12-31 |
| 10331048 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Hartmut Enkisch, Matus Kalisky | 2019-06-25 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Sebastian Strobel, Ralf Winter | 2019-02-12 |
| 10161808 | Method and arrangement for determining the heating condition of a mirror in an optical system | Peter Vogt, Martin Hermann, Andras G. Major | 2018-12-25 |
| 9997268 | EUV-mirror, optical system with EUV-mirror and associated operating method | Udo Dinger, Frederik Bijkerk, Muharrem Bayraktar | 2018-06-12 |
| 9921483 | Surface correction of mirrors with decoupling coating | Tobias Hackl, Franz-Josef Stickel, Ulrich Loering, Tilmann Assmus, Juergen Mueller +2 more | 2018-03-20 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |
| 9442383 | EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method | Udo Dinger, Frederik Bijkerk, Muharrem Bayraktar | 2016-09-13 |