Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9921483 | Surface correction of mirrors with decoupling coating | Oliver Dier, Franz-Josef Stickel, Ulrich Loering, Tilmann Assmus, Juergen Mueller +2 more | 2018-03-20 |
| 8546776 | Optical system for EUV lithography with a charged-particle source | Dirk Heinrich Ehm, Markus Weiss, Christoph Zaczek, Wolfgang Seitz | 2013-10-01 |