Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240584 | Hydraulic steering unit for a boat drive and boat drive with such a steering unit | Paul Franz, Florian Mayr, Jürgen Osterried, Michael Stegmüller | 2025-03-04 |
| 11423554 | Registering a two-dimensional image with a three-dimensional image | Anja Borsdorf, Roman Schaffert, Jian Wang | 2022-08-23 |
| 11111903 | Yaw auto-calibration for a wind turbine generator | Martin Göldner, Gottfried Slanitsch, Robert Tratnig | 2021-09-07 |
| 10061292 | Method for aligning a strip of labels | Armin Püschner | 2018-08-28 |
| 9284860 | Valve housing for a control valve of a camshaft adjusting system, and method for producing a valve housing | Phillipp Bittel, Stefan Foerst, Josef Groeschel | 2016-03-15 |
| 8546776 | Optical system for EUV lithography with a charged-particle source | Dirk Heinrich Ehm, Christoph Zaczek, Tobias Hackl, Wolfgang Seitz | 2013-10-01 |
| 8513628 | EUV illumination system with a system for measuring fluctuations of the light source | Axel Scholz, Manfred Maul, Philipp Bosselmann | 2013-08-20 |
| 8212992 | Device for damping vibrations in projection exposure apparatuses for semiconductor lithography | Peter Kloesch, Michael Ringel | 2012-07-03 |
| 8164077 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Stephan Muellender, Johann Trenkler, Hartmut Enkisch, Gisela Sipos +3 more | 2012-04-24 |
| 7875865 | EUV illumination system with a system for measuring fluctuations of the light source | Axel Scholz, Manfred Maul, Philipp Bosselmann | 2011-01-25 |
| 7802891 | Faceted mirror apparatus | Andreas Seifert, Andreas Heisler, Stefan Dornheim | 2010-09-28 |
| 7646004 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Stephan Müllender, Johann Trenkler, Hartmut Enkisch, Gisela Sipos +3 more | 2010-01-12 |
| 7614857 | Medical pump device | Rudolf Marcel Fuechslin, Rudolf Duenkl, Peter Fritz Mejer, Thomas Neff, Erich P. Stoll +1 more | 2009-11-10 |
| 7491951 | Lithographic apparatus, system and device manufacturing method | Marc Hubertus Lorenz Van Der Velden, Vadim Yevgenyevich Banine, Bastiaan Mertens, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +1 more | 2009-02-17 |
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Vadim Yevgenyevich Banine, Marcel Mathijs Theodore Marie Dierichs +5 more | 2009-01-06 |
| 7460212 | Collector configured of mirror shells | Wolfgang Singer, Wilhelm Egle, Joachim Hainz, Jochen Wietzorrek, Frank Melzer +1 more | 2008-12-02 |
| 7362414 | Optical system having an optical element that can be brought into at least two positions | Wolfgang Singer, Joachim Hainz, Joachim Wietzorrek | 2008-04-22 |
| 7354168 | Facet mirror having a number of mirror facets | Hubert Holderer, Andreas Heisler, Wolfgang Singer, Andreas Seifert, Frank Melzer +4 more | 2008-04-08 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Joachim Hainz, Joachim Wietzorrek, Johannes Wangler +5 more | 2008-01-22 |
| 7246909 | Method for the production of a facetted mirror | Andreas Seifert, Andreas Heisler, Stefan Dornheim | 2007-07-24 |
| 7248667 | Illumination system with a grating element | Wolfgang Singer, Bernd Kleemann | 2007-07-24 |
| 7244954 | Collector having unused region for illumination systems using a wavelength ≦193 nm | Wolfgang Singer, Wilhelm Egle, Joachim Hainz, Jochen Wietzorrek, Frank Melzer +1 more | 2007-07-17 |
| 7172055 | Generating elevator or escalator installation fault log | Werner Engel | 2007-02-06 |
| 7116394 | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system | Levinus Pieter Bakker, Ralph Kurt, Bastiaan Mertens, Johann Trenkler, Wolfgang Singer | 2006-10-03 |
| 7090362 | Facet mirror having a number of mirror facets | Hubert Holderer, Andreas Heisler, Wolfgang Singer, Andreas Seifert, Frank Melzer +1 more | 2006-08-15 |