Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383544 | Optical system for semiconductor lithography | Yim-Bun Patrick Kwan, Stefan Xalter, Damian Fiolka | 2016-07-05 |
| 8454230 | Method and system for indirect determination of local irradiance in an optical system | Axel Scholz | 2013-06-04 |
| 8269947 | Optical system for semiconductor lithography | Yim-Bun Patrick Kwan, Stefan Xalter, Damian Fiolka | 2012-09-18 |
| 7871171 | Focusing-device for the radiation from a light source | Martin Antoni, Andreas Seifert, Wolfgang Singer | 2011-01-18 |
| 7580207 | Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component | — | 2009-08-25 |
| 7460212 | Collector configured of mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek +1 more | 2008-12-02 |
| 7410265 | Focusing-device for the radiation from a light source | Martin Antoni, Andreas Seifert, Wolfgang Singer, Wilhelm Egle, Bernhard Gellrich +1 more | 2008-08-12 |
| 7354168 | Facet mirror having a number of mirror facets | Hubert Holderer, Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert +4 more | 2008-04-08 |
| 7321126 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2008-01-22 |
| 7244954 | Collector having unused region for illumination systems using a wavelength ≦193 nm | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek +1 more | 2007-07-17 |
| 7196841 | Lighting system, particularly for use in extreme ultraviolet (EUV) lithography | Wolfgang Singer | 2007-03-27 |
| 7090362 | Facet mirror having a number of mirror facets | Hubert Holderer, Andreas Heisler, Wolfgang Singer, Markus Weiss, Andreas Seifert +1 more | 2006-08-15 |
| 7091505 | Collector with fastening devices for fastening mirror shells | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Joachim Wietzorrek +5 more | 2006-08-15 |
| 7034998 | Method of connecting a multiplicity of optical elements to a basic body | Ulrich Bingel | 2006-04-25 |
| 7015489 | Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm | Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek +1 more | 2006-03-21 |
| 6897599 | System for damping oscillations | Franz Sorg, Stefan Xalter, Bernhard Gellrich, Michael Muehlbeyer | 2005-05-24 |
| 6844994 | Optical element deformation system | Michael Mühlbeyer, Bernhard Gellrich, Franz Sorg, Stefan Xalter, Thomas Ittner | 2005-01-18 |
| 6836530 | Illumination system with a plurality of individual gratings | Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler +2 more | 2004-12-28 |
| 6700715 | Oscillation damping system | Franz Sorg, Stefan Xalter, Michael Muehlbeyer, Bernhard Gellrich, Thomas Ittner | 2004-03-02 |
| 6655808 | Focusing-device for the radiation from a light source | Martin Antoni, Andreas Seifert, Wolfgang Singer | 2003-12-02 |
| 6603615 | Precision positioning apparatus for positioning a component especially an optical component | Martin Bayer | 2003-08-05 |