Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11324565 | Stand for a surgical microscope, surgical microscopy system, and method for optimizing an assembly space of a surgical microscopy system | Axel Lorenz, Patrick Berghoff, Jürgen Groß, Christian Wolf | 2022-05-10 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7603010 | Device consisting of at least one optical element | Yim-Bun Patrick Kwan, Johannes Lippert | 2009-10-13 |
| 6867913 | 6-mirror microlithography projection objective | Hans-Jurgen Mann, Udo Dinger | 2005-03-15 |
| 6844994 | Optical element deformation system | Frank Melzer, Bernhard Gellrich, Franz Sorg, Stefan Xalter, Thomas Ittner | 2005-01-18 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors +3 more | 2004-06-15 |
| 6191898 | Optical imaging device, particularly an objective, with at least one optical element | Michael Trunz, Ralf Hilgers, Erich Merz | 2001-02-20 |