Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194119 | Optical assembly having a thermally conductive component | Julian Kaller, Ralf Winter, Karl-Stefan Weissenrieder | 2021-12-07 |
| 11003088 | Method and device for the correction of imaging defects | Peter Deufel, Toralf Gruner | 2021-05-11 |
| 10620543 | Method and device for the correction of imaging defects | Peter Deufel, Toralf Gruner | 2020-04-14 |
| 10509336 | Optical assembly having a thermally conductive component | Julian Kaller, Ralf Winter, Karl-Stefan Weissenrieder | 2019-12-17 |
| 10345710 | Microlithographic projection exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2019-07-09 |
| 10197925 | Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner | Jens Kugler, Yim-Bun Patrick Kwan | 2019-02-05 |
| 9977228 | Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner | Jens Kugler, Yim-Bun Patrick Kwan | 2018-05-22 |
| 9436095 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2016-09-06 |
| 9081296 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2015-07-14 |
| 8902519 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2014-12-02 |
| 8711331 | Optical module for a microlithography objective including holding and supporting devices | Jens Kugler, Yim-Bun Patrick Kwan | 2014-04-29 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Armin Schoeppach, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2014-02-25 |
| 8582081 | Device for the low-deformation replaceable mounting of an optical element | Andreas Wurmbrand, Thomas Petasch, Dirk Schaffer, Siegfried Wahl | 2013-11-12 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Armin Schoeppach, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2013-09-24 |
| 8488261 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2013-07-16 |
| 8488104 | Projection objective with diaphragms | Nils Dieckmann, Alexander Wolf, Christian Holland, Ulrich Loering | 2013-07-16 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |
| 8159648 | Method and device for the correction of imaging defects | Peter Deufel, Toralf Gruner | 2012-04-17 |
| 7995296 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2011-08-09 |
| 7959536 | Method for shifting a motor vehicle automatic transmission with a hydrodynamic torque converter when the vehicle comes to a stop | Markus Eisele, Harry Nolzen, Jürgen Blaser, Thomas Vogt | 2011-06-14 |
| 7768723 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2010-08-03 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7724351 | Lithographic apparatus, device manufacturing method and exchangeable optical element | Erik Roelof Loopstra, Adrianus Franciscus Petrus Engelen, Bernardus Antonius Johannes Luttikhuis, Maria Johanna Agnes Rubingh, Johannes Martinus Andreas Hazenberg +7 more | 2010-05-25 |
| 7529046 | Optical element | Thomas Schletterer | 2009-05-05 |
| 7515363 | Replacement apparatus for an optical element | Jens Kugler, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2009-04-07 |