Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328831 | Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus | Christian Grasse, Martin Hermann, Stephan Six, Joern WEBER, Oliver Dier +3 more | 2022-05-10 |
| 11194119 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Karl-Stefan Weissenrieder | 2021-12-07 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Eric Eva, Arno Schmittner +4 more | 2021-08-24 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 10509336 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Karl-Stefan Weissenrieder | 2019-12-17 |
| 10203435 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Oliver Dier, Sebastian Strobel | 2019-02-12 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Hans-Jochen Paul, Thomas Schicketanz, Oliver Dier, Joern WEBER +2 more | 2018-03-13 |
| 8950947 | Non-magnetizable rolling bearing component of an austenitic material and method of making such a rolling bearing component | Ernst Strian, Stefan Birkner, Julia (Amberger) Hermann | 2015-02-10 |