Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194119 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Ralf Winter | 2021-12-07 |
| 10509336 | Optical assembly having a thermally conductive component | Julian Kaller, Franz Sorg, Ralf Winter | 2019-12-17 |
| 9733395 | Microlithographic projection exposure apparatus | Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Heiko Feldmann, Achim Zirkel +3 more | 2017-08-15 |
| 8928980 | Micromirror arrangement having a coating and method for the production thereof | Roland Loercher, Alexandra Pazidis | 2015-01-06 |
| 7460206 | Projection objective for immersion lithography | Patrick Scheible, Alexander Hirnet, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek +5 more | 2008-12-02 |