Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Holger Kierey, Christof Jalics, Eric Eva, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 6819470 | Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio | James D. Huffman | 2004-11-16 |
| 6522454 | Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio | James D. Huffman | 2003-02-18 |
| 6285490 | High yield spring-ring micromirror | James D. Huffman, Richard L. Knipe | 2001-09-04 |
| 6147790 | Spring-ring micromechanical device | Richard L. Knipe | 2000-11-14 |
| 6028690 | Reduced micromirror mirror gaps for improved contrast ratio | Duane E. Carter, James D. Huffman, Rodney D. Miller, Brian L. Ray | 2000-02-22 |