| 12306551 |
Projection exposure apparatus having a device for determining the concentration of atomic hydrogen |
Dirk Heinrich Ehm |
2025-05-20 |
| 12287588 |
Method for operating an EUV lithography apparatus, and EUV lithography apparatus |
Dirk Heinrich Ehm |
2025-04-29 |
| 11307505 |
Method for operating an optical apparatus, and optical apparatus |
Stefan Schmidt |
2022-04-19 |
| 11199363 |
Method for removing a contamination layer by an atomic layer etching process |
Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Edwin Te Sligte, Yves Lodewijk Maria Creijghton |
2021-12-14 |
| 11137687 |
Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma |
Bjoern Liebaug, Kerstin Hild, Joachim Hartjes, Simon Haas |
2021-10-05 |
| 10712677 |
Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning |
Irene Ament, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Wiesner, Diana Urich |
2020-07-14 |
| 10649340 |
Reflective optical element for EUV lithography |
Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Stefan Wiesner +6 more |
2020-05-12 |
| 10627217 |
Method for determining the thickness of a contaminating layer and/or the type of contaminating material, optical element and EUV-lithography system |
Irene Ament |
2020-04-21 |
| 10061205 |
Reflective optical element |
Dirk Heinrich Ehm, Irene Ament, Gisela Von Blanckenhagen, Joern WEBER |
2018-08-28 |
| 9874175 |
External heat engine device |
Harald Nes Risla, Christian Schlüter, Andreas Mück |
2018-01-23 |
| 9282121 |
Security language translations with logic resolution |
Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon, Jason F. Mackay |
2016-03-08 |
| 9251342 |
Evaluating detectability of information in authorization policies |
— |
2016-02-02 |
| 9160738 |
Delegation-based authorization |
— |
2015-10-13 |
| 8938783 |
Security language expressions for logic resolution |
Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon |
2015-01-20 |
| 8839344 |
Access policy analysis |
Blair B. Dillaway, Gregory D. Fee, Jason F. Mackay, Jason J. Hogg, John M. Leen |
2014-09-16 |
| 8656503 |
Security language translations with logic resolution |
Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon, Jason F. Mackay |
2014-02-18 |
| 8607311 |
Delegation in logic-based access control |
Blair B. Dillaway, Gregory D. Fee, John M. Leen, Jason F. Mackay |
2013-12-10 |
| 8584230 |
Security authorization queries |
Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet |
2013-11-12 |
| 8407807 |
Dynamic assertion providers for logic-based security policy languages |
Jason F. Mackay |
2013-03-26 |
| 8339576 |
Projection objective of a microlithographic projection exposure apparatus |
Ulrich Loering, Vladimir Kamenov, Dirk Heinrich Ehm, Stefan Schmidt, Andreas Wurmbrand |
2012-12-25 |
| 8296822 |
State-updating authorization |
— |
2012-10-23 |
| 8201215 |
Controlling the delegation of rights |
Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet |
2012-06-12 |
| 8095969 |
Security assertion revocation |
Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet, Brian A. LaMacchia |
2012-01-10 |
| 8060931 |
Security authorization queries |
Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet |
2011-11-15 |
| 8010560 |
Abducing assertion to support access query |
Jason F. Mackay |
2011-08-30 |
