Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306551 | Projection exposure apparatus having a device for determining the concentration of atomic hydrogen | Dirk Heinrich Ehm | 2025-05-20 |
| 12287588 | Method for operating an EUV lithography apparatus, and EUV lithography apparatus | Dirk Heinrich Ehm | 2025-04-29 |
| 11307505 | Method for operating an optical apparatus, and optical apparatus | Stefan Schmidt | 2022-04-19 |
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Edwin Te Sligte, Yves Lodewijk Maria Creijghton | 2021-12-14 |
| 11137687 | Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma | Bjoern Liebaug, Kerstin Hild, Joachim Hartjes, Simon Haas | 2021-10-05 |
| 10712677 | Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning | Irene Ament, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Wiesner, Diana Urich | 2020-07-14 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Stefan Wiesner +6 more | 2020-05-12 |
| 10627217 | Method for determining the thickness of a contaminating layer and/or the type of contaminating material, optical element and EUV-lithography system | Irene Ament | 2020-04-21 |
| 10061205 | Reflective optical element | Dirk Heinrich Ehm, Irene Ament, Gisela Von Blanckenhagen, Joern WEBER | 2018-08-28 |
| 9874175 | External heat engine device | Harald Nes Risla, Christian Schlüter, Andreas Mück | 2018-01-23 |
| 9282121 | Security language translations with logic resolution | Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon, Jason F. Mackay | 2016-03-08 |
| 9251342 | Evaluating detectability of information in authorization policies | — | 2016-02-02 |
| 9160738 | Delegation-based authorization | — | 2015-10-13 |
| 8938783 | Security language expressions for logic resolution | Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon | 2015-01-20 |
| 8839344 | Access policy analysis | Blair B. Dillaway, Gregory D. Fee, Jason F. Mackay, Jason J. Hogg, John M. Leen | 2014-09-16 |
| 8656503 | Security language translations with logic resolution | Blair B. Dillaway, Cedric Fournet, Andrew D. Gordon, Jason F. Mackay | 2014-02-18 |
| 8607311 | Delegation in logic-based access control | Blair B. Dillaway, Gregory D. Fee, John M. Leen, Jason F. Mackay | 2013-12-10 |
| 8584230 | Security authorization queries | Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet | 2013-11-12 |
| 8407807 | Dynamic assertion providers for logic-based security policy languages | Jason F. Mackay | 2013-03-26 |
| 8339576 | Projection objective of a microlithographic projection exposure apparatus | Ulrich Loering, Vladimir Kamenov, Dirk Heinrich Ehm, Stefan Schmidt, Andreas Wurmbrand | 2012-12-25 |
| 8296822 | State-updating authorization | — | 2012-10-23 |
| 8201215 | Controlling the delegation of rights | Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet | 2012-06-12 |
| 8095969 | Security assertion revocation | Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet, Brian A. LaMacchia | 2012-01-10 |
| 8060931 | Security authorization queries | Blair B. Dillaway, Andrew D. Gordon, Cedric Fournet | 2011-11-15 |
| 8010560 | Abducing assertion to support access query | Jason F. Mackay | 2011-08-30 |