Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137687 | Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma | Moritz Becker, Kerstin Hild, Joachim Hartjes, Simon Haas | 2021-10-05 |