Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12333738 | Methods, systems and computer readable mediums for evaluating and displaying a breathing motion | Erwan Guerin, Jon Day, Michael Huber | 2025-06-17 |
| 10712677 | Projection exposure system for semiconductor lithography, comprising elements for plasma conditioning | Irene Ament, Dirk Heinrich Ehm, Stefan Schmidt, Moritz Becker, Diana Urich | 2020-07-14 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 9604299 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johnannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2017-03-28 |
| 9046794 | Cleaning module, EUV lithography device and method for the cleaning thereof | Stefan Hembacher, Dieter Kraus, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Koehler +2 more | 2015-06-02 |
| 8885141 | EUV lithography device and method for processing an optical element | Wolfgang Singer, Yim-Bun Patrick Kwan, Stefan Schmidt, Dirk Heinrich Ehm, Dieter Kraus +3 more | 2014-11-11 |
| 8717531 | Mirror for guiding a radiation bundle | Severin Waldis, Florian Bach, Daniel Benz, Armin Werber, Wilfried Noell +2 more | 2014-05-06 |
| 8705006 | Method and device for connecting an optical element to a frame | Armin Schoeppach, Johannes Rau, Gennady Fedosenko, Leonid Gorkhover, Gerd Klose +5 more | 2014-04-22 |
| 8494250 | Animation for conveying spatial relationships in three-dimensional medical imaging | Bruce A. McDermott, Mervin Mencias Smith-Casem, Patric Ljung | 2013-07-23 |
| 6796664 | Method and device for decontaminating optical surfaces | Jens Luedecke, Christoph Zazcek, Alexandra Pazidis, Jens Ullmann, Annette Muehlpfordt +1 more | 2004-09-28 |
| 6474857 | Lighting device for the illumination of a vehicle decoupling bay and a method for providing the same | Alfred Ott, Uwe Frederking, Wener Heinz, Karsten Eichhorn, Ewald Topp +2 more | 2002-11-05 |
| 6371635 | Lighting device for vehicles | Alfred Ott, Uwe Frederking, Wener Heinz, Karsten Eichhorn, Ewald Topp +2 more | 2002-04-16 |