Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Severin Waldis, Armin Werber | 2017-01-03 |
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Severin Waldis, Armin Werber, Berndt Warm | 2016-12-20 |
| 8797507 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Severin Waldis, Armin Werber, Berndt Warm | 2014-08-05 |
| 8767176 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Severin Waldis, Armin Werber | 2014-07-01 |
| 8717531 | Mirror for guiding a radiation bundle | Severin Waldis, Florian Bach, Armin Werber, Wilfried Noell, Dirk Heinrich Ehm +2 more | 2014-05-06 |
| 8241019 | Pump element and pump having such a pump element | Heinz Kueck, Frank Wolter | 2012-08-14 |