Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9996012 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Norbert Muehlberger, Florian Bach | 2018-06-12 |
| 9535336 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis | 2017-01-03 |
| 9523922 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Severin Waldis, Berndt Warm | 2016-12-20 |
| 9513562 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel +1 more | 2016-12-06 |
| 9411241 | Facet mirror for use in a projection exposure apparatus for microlithography | Udo Dinger, Martin Endres, Norbert Muehlberger, Florian Bach | 2016-08-09 |
| 9274434 | Light modulator and illumination system of a microlithographic projection exposure apparatus | Severin Waldis, Florian Bach | 2016-03-01 |
| 9025128 | Actuator including magnet for a projection exposure system and projection exposure system including a magnet | Norbert Muehlberger, Almut Czap, Juergen Fischer | 2015-05-05 |
| 9013676 | Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithography | Norbert Muehlberger, Florian Bach | 2015-04-21 |
| 8885143 | Projection exposure apparatus for microlithography for the production of semiconductor components | Juergen Fischer, Armin Schoeppach, Matthias Orth, Norbert Muehlberger, Thorsten Rassel +1 more | 2014-11-11 |
| 8810805 | Light source for a sensor and a distance-measuring optoelectronic sensor | — | 2014-08-19 |
| 8797507 | Illumination system of a microlithographic projection exposure apparatus having a temperature control device | Florian Bach, Daniel Benz, Severin Waldis, Berndt Warm | 2014-08-05 |
| 8767176 | Microlithographic projection exposure apparatus | Sascha Bleidistel, Yim-Bun Patrick Kwan, Florian Bach, Daniel Benz, Severin Waldis | 2014-07-01 |
| 8717531 | Mirror for guiding a radiation bundle | Severin Waldis, Florian Bach, Daniel Benz, Wilfried Noell, Dirk Heinrich Ehm +2 more | 2014-05-06 |