Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11678979 | Eye implant for an accommodative intraocular lens | Jan Buchheister, Stefan Troeger, André Wolfstein, Hristina Srbinoska | 2023-06-20 |
| 10039177 | Source hollow body and EUV plasma light source comprising such a source hollow body | Sebastian Schall | 2018-07-31 |
| 9046794 | Cleaning module, EUV lithography device and method for the cleaning thereof | Stefan Hembacher, Dieter Kraus, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Koehler +2 more | 2015-06-02 |
| 9025128 | Actuator including magnet for a projection exposure system and projection exposure system including a magnet | Armin Werber, Norbert Muehlberger, Juergen Fischer | 2015-05-05 |
| 8885141 | EUV lithography device and method for processing an optical element | Wolfgang Singer, Yim-Bun Patrick Kwan, Stefan Schmidt, Dirk Heinrich Ehm, Dieter Kraus +3 more | 2014-11-11 |
| 8477285 | Particle cleaning of optical elements for microlithography | Dirk Heinrich Ehm, Arnoldus Jan Storm, Johannes Hubertus Josephina Moors, Mona Nagel, Jacques Cor Johan Van Der Donck +4 more | 2013-07-02 |