SS

Sebastian Schall

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
📍 Oberkochen, DE: #233 of 377 inventorsTop 65%
Overall (All Time): #2,902,027 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10039177 Source hollow body and EUV plasma light source comprising such a source hollow body Almut Czap 2018-07-31