Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784527 | Linear motor stator arrangement with external convective forced cooling | Arnulf Grimm, Tobias Hollmer | 2023-10-10 |
| 9272408 | Hand-held machine tool | Olaf Koch, Matthias Keith, Ali Shadavakhsh | 2016-03-01 |
| 9046794 | Cleaning module, EUV lithography device and method for the cleaning thereof | Stefan Hembacher, Dirk Heinrich Ehm, Stefan Schmidt, Stefan Koehler, Almut Czap +2 more | 2015-06-02 |
| 8953145 | Detection of contaminating substances in an EUV lithography apparatus | Dirk Heinrich Ehm, Stefan Schmidt | 2015-02-10 |
| 8885141 | EUV lithography device and method for processing an optical element | Wolfgang Singer, Yim-Bun Patrick Kwan, Stefan Schmidt, Dirk Heinrich Ehm, Stefan Wiesner +3 more | 2014-11-11 |
| 8717531 | Mirror for guiding a radiation bundle | Severin Waldis, Florian Bach, Daniel Benz, Armin Werber, Wilfried Noell +2 more | 2014-05-06 |
| 8585224 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-11-19 |
| 8382301 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +2 more | 2013-02-26 |
| 8054446 | EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface | Dirk Heinrich Ehm, Stefan Schmidt | 2011-11-08 |
| 7911598 | Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device | Dirk Heinrich Ehm, Thomas Stein, Harald Woelfle, Stefan Schmidt | 2011-03-22 |
| 7868263 | Percussion hand-held power tool with contactless manual switch located in side handle | Stefan Hammerstingl, Holger Cecchin, Johann Augustin, Uto Plank | 2011-01-11 |