Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9703098 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach | 2017-07-11 |
| 9551944 | Method for replacing objective parts | Bernhard Geuppert, Guido Limbach, Peter Deufel | 2017-01-24 |
| 9423695 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach | 2016-08-23 |
| 8939587 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach | 2015-01-27 |
| 8376559 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach | 2013-02-19 |
| 8092029 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Guido Limbach | 2012-01-10 |
| 7911598 | Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device | Dieter Kraus, Dirk Heinrich Ehm, Thomas Stein, Stefan Schmidt | 2011-03-22 |