Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684551 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2020-06-16 |
| 10317802 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2019-06-11 |
| 10203607 | Optical element unit for exposure processes | Tilman Schwertner, Ulrich Bingel, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2019-02-12 |
| 10031423 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2018-07-24 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9703098 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2017-07-11 |
| 9575224 | Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective | Rolf Freimann, Norman Baer, Thure Boehm, Gero Wittich | 2017-02-21 |
| 9551944 | Method for replacing objective parts | Bernhard Geuppert, Harald Woelfle, Peter Deufel | 2017-01-24 |
| 9423695 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2016-08-23 |
| 9316929 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2016-04-19 |
| 9175948 | Optical module with a measuring device | Armin Schoeppach, Stefan Hembacher, Jens Kugler | 2015-11-03 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Ulrich Bingel, Julian Kaller, Hans-Juergen Scherle, Jens Kugler +2 more | 2015-06-02 |
| 8939587 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2015-01-27 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2014-02-25 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering, Dirk Hellweg +7 more | 2013-09-24 |
| 8376559 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2013-02-19 |
| 8092029 | Lens module comprising at least one exchangeable optical element | Guido Soyez, Stephan Back, Joachim Buechele, Julian Kaller, Harald Woelfle | 2012-01-10 |
| 7545483 | Optical element unit for exposure processes | Bernhard Gellrich, Jens Kugler, Thomas Schletterer, Julian Kaller, Hans-Juergen Scherle +2 more | 2009-06-09 |