Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575224 | Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective | Rolf Freimann, Norman Baer, Guido Limbach, Gero Wittich | 2017-02-21 |
| 8795839 | Repair method for optical elements having a coating and corresponding optical elements | — | 2014-08-05 |
| 6740159 | Method of making a fracture-resistant calcium fluoride single crystal and its use | Joerg Kandler, Ewald Moersen, Burkhard Speit, Harry J. Bauer, Eric Eva +4 more | 2004-05-25 |
| 6667839 | Holding device for an optical element made of a crystalline material | Jurgen Hartmaier, Dietrich Klaassen, Bernhard Wergl, Michael Gerhard, Jens Spanuth +3 more | 2003-12-23 |