Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Hubert Holderer, Winfried Kaiser, Alexander Kohl, Jens Kugler +2 more | 2007-01-30 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Hubert Holderer, Winfried Kaiser, Alexander Kohl, Jens Kugler +2 more | 2005-04-12 |
| 6667839 | Holding device for an optical element made of a crystalline material | Dietrich Klaassen, Thure Boehm, Bernhard Wergl, Michael Gerhard, Jens Spanuth +3 more | 2003-12-23 |