Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10191382 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2019-01-29 |
| 9977333 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2018-05-22 |
| 9599904 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2017-03-21 |
| 9470981 | Microlithographic projection exposure apparatus illumination optics | — | 2016-10-18 |
| 9310694 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2016-04-12 |
| 9223226 | Microlithographic projection exposure apparatus illumination optics | — | 2015-12-29 |
| 9052611 | Microlithographic projection exposure apparatus illumination optics | — | 2015-06-09 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8467031 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther, Michael Layh | 2013-06-18 |
| 8085382 | Microlithographic projection exposure apparatus illumination optics | — | 2011-12-27 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7656595 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch | 2010-02-02 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Deguenther, Markus Brotsack, Gerhard Fuerter, Wolfgang Singer +2 more | 2009-03-31 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |
| 7457059 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch | 2008-11-25 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2007-12-04 |
| 7193794 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Thomas Petasch, Cornelia Roesch | 2007-03-20 |
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Jens Kugler +2 more | 2007-01-30 |
| 7123427 | Objective, particularly a projection objective for use in semiconductor lithography | Hubert Holderer, Werner Lang, Hartmut Brandenburg | 2006-10-17 |
| 7079331 | Device for holding a beam splitter element | Ulrich Weber, Hubert Holderer, Armin Schoeppach, Erwin Gaber, Winfried Kaiser +5 more | 2006-07-18 |
| 7027237 | Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method | Birgit Mecking, Toralf Gruner | 2006-04-11 |
| 7014328 | Apparatus for tilting a carrier for optical elements | Ulrich Weber, Hubert Holderer | 2006-03-21 |
| 6963449 | Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method | Birgit Mecking, Toralf Gruner | 2005-11-08 |
| 6943965 | Method for correcting oscillation-induced imaging errors in an objective | Hubert Holderer | 2005-09-13 |