Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520826 | Optical element, optical assembly and production method | Roland Pilz | 2019-12-31 |
| 10175582 | Optical element, optical assembly and production method | Roland Pilz | 2019-01-08 |
| 10042265 | Lithographic projection objective | Olaf Rogalsky, Boris Bittner, Jochen Haeussler | 2018-08-07 |
| 9891535 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2018-02-13 |
| 9557653 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2017-01-31 |
| 9494868 | Lithographic projection objective | Olaf Rogalsky, Boris Bittner, Jochen Haeussler | 2016-11-15 |
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2015-08-11 |
| 8605253 | Lithographic projection objective | Olaf Rogalsky, Boris Bittner, Jochen Haeussler | 2013-12-10 |
| 8582081 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Andreas Wurmbrand, Dirk Schaffer, Siegfried Wahl | 2013-11-12 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Jens Kugler, Martin Mahlmann +2 more | 2012-10-30 |
| 7800849 | Apparatus for mounting two or more elements and method for processing the surface of an optical element | Hubert Holderer, Chris Reed, Dragos Pariza, Mike Meehan, Gary Krebs | 2010-09-21 |
| 7656595 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Cornelia Roesch, Alexander Kohl | 2010-02-02 |
| 7471469 | Device for the low-deformation replaceable mounting of an optical element | Franz Sorg, Andreas Wurmbrand, Dirk Schaffer, Siegfried Wahl | 2008-12-30 |
| 7457059 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Cornelia Roesch, Alexander Kohl | 2008-11-25 |
| 7295331 | Optical element with an optical axis | Hartmut Muenker, Bernhard Gellrich | 2007-11-13 |
| 7193794 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Hubert Holderer, Cornelia Roesch, Alexander Kohl | 2007-03-20 |
| 7082693 | Adjusting apparatus for devices and for setting adjustments | Klaus-Dieter Klein, Hartmut Muenker | 2006-08-01 |
| 7061698 | Lens system, in particular a projection lens system for semiconductor lithography | Karlfrid Osterried, Jens Kugler | 2006-06-13 |
| 6870632 | Apparatus for mounting an optical element in an optical system | Hartmut Muenker, Klaus-Dieter Klein | 2005-03-22 |