Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11256182 | Process for cleaning optical elements for the ultraviolet wavelength range | Konstantin Forcht, Irene Ament | 2022-02-22 |
| 10754132 | Imaging optical system for microlithography | Sonja Schneider, Boris Bittner, Jens Kugler, Bernhard Gellrich, Rolf Freimann | 2020-08-25 |
| 10042265 | Lithographic projection objective | Boris Bittner, Thomas Petasch, Jochen Haeussler | 2018-08-07 |
| 9494868 | Lithographic projection objective | Boris Bittner, Thomas Petasch, Jochen Haeussler | 2016-11-15 |
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2015-10-20 |
| 8605253 | Lithographic projection objective | Boris Bittner, Thomas Petasch, Jochen Haeussler | 2013-12-10 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2012-11-27 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2010-08-24 |