Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7061698 | Lens system, in particular a projection lens system for semiconductor lithography | Thomas Petasch, Jens Kugler | 2006-06-13 |
| 6829107 | Device for mounting an optical element, for example a lens element in a lens | — | 2004-12-07 |
| 6445516 | Lens system, in particular projection lens system in semiconductor lithography | — | 2002-09-03 |