Issued Patents All Time
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789367 | Facet mirror for an illumination optical unit of a projection exposure apparatus | Willi Anderl, Christian Körner, Markus Holz, Manuel Stompe, Stefan Seitz | 2023-10-17 |
| 11720028 | Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithography | Thomas Fischer, Lars Wischmeier, Michael Patra | 2023-08-08 |
| 11448968 | Beam-forming and illuminating system for a lithography system, lithography system, and method | Klaus Abele, Björn Liebaug | 2022-09-20 |
| 11422470 | Imaging optical unit for EUV microlithography | Johannes Ruoff | 2022-08-23 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2021-06-29 |
| 10514608 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Matthias Manger, Ulrich Mueller, Joerg Lichtenthaeler +3 more | 2019-12-24 |
| 9810996 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2017-11-07 |
| 8902401 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2014-12-02 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2013-08-20 |
| 8508868 | Holding arrangement for an optical element | Ulrich Weber, Armin Schoeppach | 2013-08-13 |
| 8456771 | Holding arrangement for an optical element | Ulrich Weber | 2013-06-04 |
| 8456615 | Optical system having heat dissipation arrangement | Johannes Lippert, Armin Schoeppach | 2013-06-04 |
| 8363206 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Jens Kugler, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek +1 more | 2013-01-29 |
| 8342701 | Reflective optical element for use in an EUV system | Holger Kierey, Michel Le Maire, Willi Anderl, Anton Lengel | 2013-01-01 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel +4 more | 2011-08-02 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2011-06-14 |
| 7830611 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel, Arif Kazi +4 more | 2010-11-09 |
| 7816022 | Composite structure for microlithography and optical arrangement | Claudia Ekstein | 2010-10-19 |
| 7800849 | Apparatus for mounting two or more elements and method for processing the surface of an optical element | Thomas Petasch, Chris Reed, Dragos Pariza, Mike Meehan, Gary Krebs | 2010-09-21 |
| 7791711 | Projection method including pupillary filtering and a projection lens therefor | Christian Hembd-Soellner, Rudolf Von Buenau, Ulrich Haag | 2010-09-07 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Erich Merz, Raoul Reiner +10 more | 2010-05-04 |
| 7656595 | Adjustment arrangement of an optical element | Klaus Beck, Bernhard Gellrich, Thomas Petasch, Cornelia Roesch, Alexander Kohl | 2010-02-02 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7551375 | Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly | Johannes Rau, Josef Distl, Armin Schoeppach | 2009-06-23 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |