Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7551375 | Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly | Johannes Rau, Armin Schoeppach, Hubert Holderer | 2009-06-23 |
| 6824277 | Optical beam guidance system and method for preventing contamination of optical components contained therein | Ansgar Freitag, Ulrich Bingel, Uwe Hamm | 2004-11-30 |